JPH0243638Y2 - - Google Patents

Info

Publication number
JPH0243638Y2
JPH0243638Y2 JP1985193819U JP19381985U JPH0243638Y2 JP H0243638 Y2 JPH0243638 Y2 JP H0243638Y2 JP 1985193819 U JP1985193819 U JP 1985193819U JP 19381985 U JP19381985 U JP 19381985U JP H0243638 Y2 JPH0243638 Y2 JP H0243638Y2
Authority
JP
Japan
Prior art keywords
chuck
elastic body
attracted
tapered surface
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985193819U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62100835U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985193819U priority Critical patent/JPH0243638Y2/ja
Publication of JPS62100835U publication Critical patent/JPS62100835U/ja
Application granted granted Critical
Publication of JPH0243638Y2 publication Critical patent/JPH0243638Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1985193819U 1985-12-16 1985-12-16 Expired JPH0243638Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985193819U JPH0243638Y2 (en]) 1985-12-16 1985-12-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985193819U JPH0243638Y2 (en]) 1985-12-16 1985-12-16

Publications (2)

Publication Number Publication Date
JPS62100835U JPS62100835U (en]) 1987-06-26
JPH0243638Y2 true JPH0243638Y2 (en]) 1990-11-20

Family

ID=31150199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985193819U Expired JPH0243638Y2 (en]) 1985-12-16 1985-12-16

Country Status (1)

Country Link
JP (1) JPH0243638Y2 (en])

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2691299B2 (ja) * 1989-06-12 1997-12-17 株式会社ニコン 基板ホルダ
JPH11307619A (ja) * 1998-04-20 1999-11-05 Yamatake Corp ウエハ固定装置
JPH11309638A (ja) * 1998-04-28 1999-11-09 Kyocera Corp 真空吸着盤
JP6725326B2 (ja) * 2016-06-03 2020-07-15 日本特殊陶業株式会社 真空チャック及び真空チャックの製造方法
CN111050991A (zh) * 2017-09-07 2020-04-21 新光株式会社 固定装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54164982U (en]) * 1978-05-11 1979-11-19

Also Published As

Publication number Publication date
JPS62100835U (en]) 1987-06-26

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